Ferrule assembly and optical module

ABSTRACT

An optical module including a substrate having a groove; an optical waveguide layer formed on the substrate, the optical waveguide layer including an optical waveguide core having first and second ends, the first end being aligned with the groove, and an optical waveguide cladding covering the optical waveguide core; a ferrule having a through hole; and an optical fiber inserted and fixed in the through hole. The ferrule has a flat cut portion for semicylindrically exposing a part of the optical fiber inserted and fixed in the through hole. The ferrule is fixed at the flat cut portion to the substrate so that the part of the optical fiber exposed to the flat cut portion is inserted into the groove of the substrate until one end of the optical fiber abuts against the first end of the optical waveguide core.

This application is a divisional of application Ser. No. 09/810,399,filed Mar. 19, 2001, U.S. Pat. No. 6,394,663, which is divisional ofapplication Ser. No. 09/349,706, filed Jul. 8, 1999, U.S. Pat. No.6,241,399.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates generally to an optical transmissionmodule for use in the optical communication field, and more particularlyto a receptacle type optical transmission module.

2. Description of the Related Art

In the recent information communications field, high-speedlarge-capacity processing and high-speed data transmission are requiredin response to the advancement of information. To meet this requirement,optical transmission is indispensable and preparation is now proceedingtoward the expansion and diffusion of an optical communications network.

Known as a device used at many sites in an optical transmission systemis an optical transmission module having an optical circuit and anelectrical circuit in combination for performing opto-electricalconversion or electro-optical conversion. At present, the productionscale of the optical transmission module per communications maker isabout 10⁵ products per year. However, it is said that the productionscale required in the future will become 10⁶ or more products per yearin response to the diffusion of an optical communications network andthat the production cost must be reduced to about {fraction (1/10)} orless of the present level. Accordingly, it is strongly desired toestablish any form of the optical transmission module which can realizemass production and low cost by minimizing the number of components tosimplify the assembly process and can also ensure high reliability andlong service life.

The components mounted on a printed wiring board built in acommunications device are generally classified into a surface mount typeand a through hole mount type. A typical example of the surface mounttype components is an LSI, which has a form called a flat package. Sucha component is soldered to the printed wiring board by a reflowsoldering process. This process is performed by printing a solder pasteon the printed wiring board, making the surface mount type componentstick to the printed solder paste, and heating the whole in a conveyoroven to a solder surface temperature of 220° C. or higher.

A typical example of the through hole mount type components is alarge-capacity capacitor or a multi-terminal (200 or more terminals)LSI. The multi-terminal LSI has a terminals form called a PGA (Pin GridArray). Such a through hole mount type component is soldered to theprinted wiring board by a flow soldering process. This process isperformed by inserting the terminals of the through hole mount typecomponent into through holes of the printed wiring board, and puttingthe printed wiring board into a solder bath heated at about 260° C. fromthe side opposite to its component mounting surface.

In mounting an optical module on the printed wiring board by solderinglike the surface mount type component or the through hole mount typecomponent, a so-called pigtail type of optical module with an opticalfiber cord is not suitable as the optical module. That is, the opticalfiber cord usually has a nylon coating, and the nylon coating has a lowresistance to heat at about 80° C., so that it is melted in thesoldering step. Furthermore, the optical fiber cord itself invitesinconveniences in accommodation and handling at a manufacturinglocation, causing a remarkable reduction in mounting efficiency to theprinted wiring board.

Accordingly, to allow a soldering process for the optical module andreduce a manufacturing cost, the application of a so-called receptacletype of optical module is indispensable. An example of the receptacletype optical module allowing a soldering process is known from 1996IEICE, General Meeting Proc., C-207 (Ref. 1). In Ref. 1, there isdescribed a receptacle type optical module manufactured by retaining aphotoelectric converter and a ferrule with a bare optical fiber on asilicon substrate, next covering the whole with a silicon cap tohermetically seal an optical coupling region, and finally molding thewhole with an epoxy resin.

The silicon substrate is formed with a V groove for positioning theoptical fiber and the ferrule, both of which are simultaneously fixed bythe silicon cap. A lead frame is fixed by an adhesive directly to thesilicon substrate, so that the lead frame forms electrical input andoutput terminals. A commercially available MU type connector housing ismounted on an optical fiber connecting portion to realize connection anddisconnection of another optical fiber. By flow soldering of the leadframe extending from the molded package, the optical module is mountedon a printed wiring board.

Another example is known from 1997 IEICE, General Meeting Proc., C-361(Ref. 2). In Ref. 2, a V groove for positioning a bare optical fiber anda ferrule is formed on a silicon substrate as in Ref. 1. The bareoptical fiber is fixed to the silicon substrate by a glass plate througha UV curable adhesive, thereby realizing optical coupling between theoptical fiber and a photoelectric converter.

An optical coupling region between the photoelectric converter and theoptical fiber is sealed by a transparent epoxy resin. The siliconsubstrate is fixed to a lead frame forming an electrical input terminal,and the lead frame is connected through a gold wire to the photoelectricconverter. The whole except an end portion of the ferrule is molded witha resin to form a molded package. An optical connector adapter ismounted onto the molded package to complete an optical module. Theoptical connector adapter is used to detachably connect another opticalfiber to the optical module. By flow soldering of the lead frameextending from the molded package, the optical module is mounted on aprinted wiring board.

In an optical subscriber transmission system, economization of theoptical transmission system as a whole is also necessary. To this end,there has been proposed and standardized a wavelength divisionmultiplexing bidirectional communication system having a single officeterminal to be used commonly by many subscribers. To realize thisconfiguration, an optical module having wavelengthmultiplexing/demultiplexing functions is required both in each of thesubscriber terminals and in the office terminal. In particular, anoptical module incorporating a PLC (planar lightwave circuit) formed byintegrating the wavelength multiplexing/demultiplexing functions in onechip is expected from the viewpoints of mass production and costreduction.

In reducing an assembly cost for such a subscriber optical transmissionmodule, it is important to ensure a cost reducing technique for areceptacle structure of an optical fiber interface, especially, aninterface between a PLC having wavelength multiplexing/demultiplexingfunctions and an optical fiber. Conventionally known is a self-alignmenttechnique for the connection between a PLC and an optical fiber. In thisconventional technique, a fiber guide is formed on a silicon substrateso as to make alignment of the core of an optical waveguide in the PLCand the core of the optical fiber, thereby determining optimum positionsof the PLC and the optical fiber in a self-aligned fashion.

According to such a self-alignment mounting method, it is not necessaryto supply a current to an optical semiconductor element, and it is alsonot necessary to provide a complicated aligning device for aligning thecore of the optical waveguide and the core of the optical fiber.Further, no time for the alignment is needed. Accordingly, this methodis suitable for mass production and cost reduction.

Known as another example of the receptacle type optical module in theprior art is a technique of optically connecting an optical element anda receptacle ferrule through a V-grooved silicon substrate in aself-aligned fashion. By replacing the optical element with an opticalwaveguide to follow this prior art technique, it is possible to obtain astructure such that the optical waveguide and the receptacle ferrule areto be optically connected through a V-grooved PLC substrate in aself-aligned fashion.

Also known as another prior art technique is a receptacle type opticalmodule for providing an interface between a PLC having a plurality ofoptical waveguide cores and multiple optical fibers. In this prior arttechnique, V grooves for two guide pins are formed on a substrate, andoptical coupling between a plurality of optical elements mounted on thesubstrate or the plurality of optical waveguide cores and the multipleoptical fibers is attained through the two guide pins.

The above-mentioned conventional receptacle type optical module has thefollowing problems. First, a deep V groove must be formed on thesubstrate, so as to mount the ferrule on the substrate. Accordingly, thesilicon substrate on which the optical element is mounted or the PLCsubstrate on which the optical waveguide is formed must be made thick,resulting in an increase in material cost. Further, the substrate mustbe left under the ferrule, causing a disadvantage in reducing thethickness of the optical module.

Secondly, in the conventional receptacle type optical module, theferrule mounted in the V groove and the optical element or the opticalwaveguide core are aligned with each other. Accordingly, there is apossibility of large misalignment between the optical waveguide core (oran active layer in the optical element) and the core of the opticalfiber fixed in the ferrule, causing a large optical coupling loss. As aresult, characteristics of the optical module are degraded.

SUMMARY OF THE INVENTION

It is therefore an object of the present invention to provide areceptacle type optical module suitable for cost reduction and sizereduction.

It is another object of the present invention to provide a ferruleassembly required for assembling of the receptacle type optical module.

In accordance with an aspect of the present invention, there is provideda ferrule assembly comprising a ferrule having a through hole; and anoptical fiber inserted and fixed in the through hole; the ferrule havinga flat cut portion for semicylindrically exposing a part of the opticalfiber inserted and fixed in the through hole.

In accordance with another aspect of the present invention, there isprovided an optical module comprising a substrate having a groove; anoptical waveguide layer formed on the substrate, the optical waveguidelayer comprising an optical waveguide core having first and second ends,the first end being aligned with the groove, and an optical waveguidecladding covering the optical waveguide core; a ferrule having a throughhole; and an optical fiber inserted and fixed in the through hole; theferrule having a flat cut portion for semicylindrically exposing a partof the optical fiber inserted and fixed in the through hole; the ferrulebeing fixed at the flat cut portion to the substrate so that the part ofthe optical fiber exposed to the flat cut portion is inserted into thegroove of the substrate until one end of the optical fiber abuts againstthe first end of the optical waveguide core.

Preferably, an optical element such as a laser diode or a photodiode ismounted on the substrate at its one end portion opposite to the otherend portion on which the ferrule is mounted so that the optical elementis optically coupled to the second end of the optical waveguide core.

In accordance with still another aspect of the present invention, thereis provided an optical module comprising a substrate having first andsecond grooves at opposite end portions thereof; an optical waveguidelayer formed on an intermediate portion of the substrate, the opticalwaveguide layer comprising an optical waveguide core having first andsecond ends respectively aligned with the first and second grooves, andan optical waveguide cladding covering the optical waveguide core; firstand second ferrules each having a through hole; and first and secondoptical fibers inserted and fixed in the through holes of the first andsecond ferrules, respectively; the first and second ferrulesrespectively having first and second flat cut portions forsemicylindrically exposing a part of the first optical fiber insertedand fixed in the through hole of the first ferrule and a part of thesecond optical fiber inserted and fixed in the through hole of thesecond ferrule, respectively; the first ferrule being fixed at the firstflat cut portion to the substrate so that the part of the first opticalfiber exposed to the first flat cut portion is inserted into the firstgroove of the substrate until one end of the first optical fiber abutsagainst the first end of the optical waveguide core; the second ferrulebeing fixed at the second flat cut portion to the substrate so that thepart of the second optical fiber exposed to the second flat cut portionis inserted into the second groove of the substrate until one end of thesecond optical fiber abuts against the second end of the opticalwaveguide core.

In accordance with a further aspect of the present invention, there isprovided an optical module comprising a substrate having a groove; anoptical waveguide layer formed on the substrate, the optical waveguidelayer comprising a first optical waveguide core having first and secondends, a second optical waveguide core having third and fourth ends, thethird end being connected to an intermediate portion of the firstoptical waveguide core, and an optical waveguide cladding covering thefirst and second optical cores; an optical wavelength filter mounted onthe substrate so as to intersect a junction between the first and secondoptical waveguide cores; a semicut ferrule assembly comprising a ferrulehaving a through hole, and an optical fiber inserted and fixed in thethrough hole, the ferrule having a flat cut portion forsemicylindrically exposing a part of the optical fiber inserted andfixed in the through hole, the ferrule being fixed at the flat cutportion to the substrate so that the part of the optical fiber exposedto the flat cut portion is inserted into the groove of the substrateuntil one end of the optical fiber abuts against the first end of thefirst optical waveguide core; a first optical element mounted on thesubstrate so as to be optically coupled to the second end of the firstoptical waveguide core; and a second optical element mounted on thesubstrate so as to be optically coupled to the fourth end of the secondoptical waveguide core.

For example, the first optical element is a photodiode for detecting alaser beam having wavelengths in a 1.55 μm band, and the second opticalelement is a laser diode for emitting a laser beam having wavelengths ina 1.3 μm band.

In accordance with a further aspect of the present invention, there isprovided an optical module comprising a substrate having a first makerat one end portion thereof; an optical waveguide layer formed on thesubstrate, the optical waveguide layer comprising an optical waveguidecore and an optical waveguide cladding covering the optical waveguidecore, the optical waveguide cladding having a narrow first portion and awide second portion; a glass plate having a groove and a second marker,the glass plate being fixed to the substrate so that the second markeris aligned with the first marker, and that the groove accommodates thefirst portion of the optical waveguide cladding; and a semicut ferruleassembly comprising a ferrule having a through hole, and an opticalfiber inserted and fixed in the through hole, the ferrule having a flatcut portion for semicylindrically exposing a part of the optical fiberinserted and fixed in the through hole, the ferrule being fixed at theflat cut portion to the glass plate so that the part of the opticalfiber exposed to the flat cut portion is inserted in the groove of theglass plate to optically couple the optical fiber to the opticalwaveguide core.

In accordance with a further aspect of the present invention, there isprovided an optical module comprising a substrate having a plurality ofgrooves; an optical waveguide layer formed on the substrate, the opticalwaveguide layer comprising a plurality of optical waveguide cores havinga plurality of first ends respectively aligned with the grooves, and anoptical waveguide cladding covering the optical waveguide cores; and aconnector assembly comprising a block having a plurality of throughholes, a plurality of optical fibers inserted and fixed in the throughholes, respectively, and a plurality of guide pins fixed to the block,the block having a flat cut portion for semicylindrically exposing apart of each of the optical fibers inserted and fixed in the throughholes; the block being fixed at the flat cut portion to the substrate sothat the parts of the optical fibers exposed to the flat cut portion areinserted into the grooves of the substrate until front ends of theoptical fibers abut against the first ends of the optical waveguidecores, respectively.

In accordance with a further aspect of the present invention, there isprovided an optical module comprising a substrate having an end portionformed with a first groove and another end portion formed with aplurality of second grooves; an optical waveguide layer formed on anintermediate portion of the substrate, the optical waveguide layercomprising an optical waveguide core having a first end aligned with thefirst groove and a plurality of second ends respectively aligned withthe second grooves, and an optical waveguide cladding covering theoptical waveguide core; a first connector assembly comprising a firstblock having a first through hole, a first optical fiber inserted andfixed in the first through hole, and a plurality of first guide pinsfixed to the first block, the first block having a first flat cutportion for semicylindrically exposing a part of the first optical fiberinserted and fixed in the first through hole; and a second connectorassembly comprising a second block having a plurality of second throughholes, a plurality of second optical fibers inserted and fixed in thesecond through holes, respectively, and a plurality of second guide pinsfixed to the second block, the second block having a second flat cutportion for semicylindrically exposing a part of each of the secondoptical fibers inserted and fixed in the second through holes; the firstconnector assembly being fixed at the first flat cut portion to thesubstrate so that the part of the first optical fiber exposed to thefirst flat cut portion is inserted into the first groove of thesubstrate until a front end of the first optical fiber abuts against thefirst end of the optical waveguide core; the second connector assemblybeing fixed at the second flat cut portion to the substrate so that theparts of the second optical fibers exposed to the second flat cutportion are inserted into the second grooves of the substrate untilfront ends of the second optical fibers abut against the second ends ofthe optical waveguide cores, respectively.

The above and other objects, features and advantages of the presentinvention and the manner of realizing them will become more apparent,and the invention itself will best be understood from a study of thefollowing description and appended claims with reference to the attacheddrawings showing some preferred embodiments of the invention.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is an exploded perspective view of a first preferred embodimentof the present invention;

FIG. 2 is a partially sectional, side view of the first preferredembodiment in its assembled condition;

FIG. 3 is a cross section taken along the line 3—3 in FIG. 2;

FIG. 4 is an exploded perspective view of a second preferred embodimentof the present invention;

FIG. 5 is a partially sectional, side view of the second preferredembodiment in its assembled condition;

FIG. 6 is a cross section of the second preferred embodiment as similarto FIG. 3;

FIG. 7 is a perspective view showing another preferred embodiment of aferrule assembly;

FIGS. 8A to 8C are perspective views showing other preferred embodimentsof the ferrule assembly;

FIGS. 9A and 9B are perspective views showing still other preferredembodiments of the ferrule assembly;

FIG. 10 is a perspective view showing a coupling structure of differenttypes of ferrules;

FIG. 11 is a perspective view of a third preferred embodiment of thepresent invention;

FIG. 12 is a perspective view of a fourth preferred embodiment of thepresent invention;

FIG. 13 is a perspective view of a fifth preferred embodiment of thepresent invention;

FIG. 14 is a perspective view of a sixth preferred embodiment of thepresent invention;

FIG. 15 is a perspective view of a seventh preferred embodiment of thepresent invention;

FIG. 16 is a perspective view of an eighth preferred embodiment of thepresent invention;

FIG. 17 is a perspective view of a ninth preferred embodiment of thepresent invention;

FIG. 18 is a perspective view of a tenth preferred embodiment of thepresent invention;

FIG. 19 is a perspective view of an eleventh preferred embodiment of thepresent invention;

FIG. 20 is a perspective view of a twelfth preferred embodiment of thepresent invention;

FIG. 21 is a perspective view of a thirteenth preferred embodiment ofthe present invention;

FIG. 22A is a perspective view of a fourteenth preferred embodiment ofthe present invention;

FIG. 22B is a perspective view showing a modification of the fourteenthpreferred embodiment;

FIG. 23 is a perspective view of a fifteenth preferred embodiment of thepresent invention;

FIG. 24 is a plan view of a sixteenth preferred embodiment of thepresent invention;

FIG. 25 is a perspective view of a seventeenth preferred embodiment ofthe present invention;

FIG. 26 is a perspective view of an eighteenth preferred embodiment ofthe present invention;

FIG. 27 is a perspective view of a nineteenth preferred embodiment ofthe present invention;

FIG. 28 is a perspective view showing a PLC used in the nineteenthpreferred embodiment;

FIG. 29A is a perspective view of a glass plate used in the nineteenthpreferred embodiment;

FIG. 29B is a perspective view showing a modification of the glassplate;

FIG. 30A is an exploded perspective view of a twentieth preferredembodiment of the present invention;

FIG. 30B is a perspective view of the twentieth preferred embodiment inits assembled condition;

FIG. 31 is an exploded perspective view of a twenty-first preferredembodiment of the present invention;

FIG. 32 is a perspective view showing another preferred embodiment of amultfiber semicut connector;

FIG. 33 is an exploded perspective view of a twenty-second preferredembodiment of the present invention;

FIG. 34 is an exploded perspective view of a twenty-third preferredembodiment of the present invention;

FIG. 35A is an exploded perspective view of a twenty-fourth preferredembodiment of the present invention;

FIG. 35B is a perspective view of the twenty-fourth preferred embodimentin its assembled condition;

FIG. 36A is an exploded perspective view of a twenty-fifth preferredembodiment of the present invention;

FIG. 36B is a perspective view of the twenty-fifth preferred embodimentin its assembled condition;

FIG. 37A is an exploded perspective view of a twenty-sixth preferredembodiment of the present invention;

FIG. 37B is a perspective view of the twenty-sixth preferred embodimentin its assembled condition;

FIG. 38 is an exploded perspective view of a twenty-seventh preferredembodiment of the present invention;

FIG. 39A is an exploded perspective view of a twenty-eighth preferredembodiment of the present invention; and

FIG. 39B is a perspective view of the twenty-eighth preferred embodimentin its assembled condition.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Various preferred embodiments of the present invention will now bedescribed in detail with reference to the drawings. In the followingdescription of the preferred embodiments, substantially the same orsimilar parts will be denoted by the same reference numerals and thedescription thereof will be partially omitted to avoid repetition.

Referring to FIG. 1, there is shown an exploded perspective view of anoptical module 2 according to a first preferred embodiment of thepresent invention. FIG. 2 is a partially sectional, side view of theoptical module 2, and FIG. 3 is a cross section taken along the line 3—3in FIG. 2. The optical module 2 includes a PLC (planar lightwavecircuit) 4 and a semicut ferrule assembly 16 connected to the PLC 4. ThePLC 4 includes a silicon substrate 6 and an optical waveguide layer 8formed on the silicon substrate 6. The optical waveguide layer 8includes an optical waveguide core 10 and an optical waveguide cladding12 covering the optical waveguide core 10. The optical waveguide core 10has a square cross section whose side is about 8 μm. An optical signalpropagates in the optical waveguide core 10 having a refractive indexhigher than that of the optical waveguide cladding 12.

The upper surface of the silicon substrate 6 is exposed at its one endportion 6 a, and a V groove 14 is formed on the exposed upper surface 6a of the substrate 6 by anisotropic etching of silicon. The position andsize of the V groove 14 are set so that when a bare optical fiber havinga circular cross section whose diameter is 125 μm is mounted in the Vgroove 14, the core (diameter: 9.5 μm) of the bare optical fiber isaligned with the optical waveguide core 10. The semicut ferrule assembly16 includes a cylindrical ferrule 18 having a through hole 20 and a bareoptical fiber 22 inserted and fixed in the through hole 20. The ferrule18 is formed of zirconia, for example. The ferrule 18 further includes aflat cut portion 24 for semicylindrically exposing a part of the opticalfiber 22 inserted and fixed in the through hole 20.

The semicut ferrule assembly 16 is fabricated by semicylindricallycutting a part of a completely cylindrical ferrule to thereby form theferrule 18 having the flat cut portion 24, and next inserting the bareoptical fiber 22 into the through hole 20 so that the opposite end facesof the bare optical fiber 22 become substantially flush with theopposite end faces of the ferrule 18. The bare optical fiber 22 is fixedby an adhesive in the through hole 20 defined in a cylindrical portionof the ferrule 18 except the flat cut portion 24. The semicut ferruleassembly 16 is mounted to the PLC 4 by inserting the bare optical fiber22 exposed to the flat cut portion 24 into the V groove 14 exposed tothe upper surface 6 a of the silicon substrate 6 until one end 22 a ofthe bare optical fiber 22 abuts against one end 10 a of the opticalwaveguide core 10, and fixing the flat cut portion 24 of the ferrule 18to the upper surface 6 a of the silicon substrate 6 by using anadhesive.

As shown in FIG. 3, a gap 26 is defined between the upper surface 6 a ofthe silicon substrate 6 and the flat cut portion 24 of the ferrule 18.The adhesive is applied to this gap 26 to thereby fix the ferrule 18 tothe silicon substrate 6. Reference numeral 28 in FIG. 3 denotes the coreof the bare optical fiber 22. It is shown that the core 28 of the bareoptical fiber 22 is aligned with the optical waveguide core 10.

The optical module 2 according to the first preferred embodiment has thefollowing advantages.

(1) A pressure plate for fixing the ferrule 18 or the bare optical fiber22 is not required, but a minimum number of components (only the PLC 4and the ferrule assembly 16) and a minimum assembly cost are required.

(2) It is not necessary to provide adhesive bonding areas on theopposite sides of the diametrical portion of the ferrule 18 on the PLCsubstrate (the silicon substrate) 6, so that the width of the PLCsubstrate 6 can be reduced.

(3) It is not necessary to form a groove for mounting the ferrule 18 onthe PLC substrate 6, but the V groove 14 for mounting the bare opticalfiber 22 is only formed on the PLC substrate 6, so that the thickness ofthe PLC substrate 6 can be reduced.

(4) The bare optical fiber 22 does not project from the ferrule 18, sothat there is no possibility of breaking of the optical fiber 22 inassembling the optical module 2, thereby improving the worker safety andyield rate.

(5) The bare optical fiber 22 is fixed by adhesion in the ferrule 18 soas to prevent generation of fiber bends, so that the stability againsttemperature variations or the like can be ensured to thereby attain highreliability with less characteristics variations.

Referring to FIG. 4, there is shown an exploded perspective view of anoptical module 30 according to a second preferred embodiment of thepresent invention. FIG. 5 is a partially sectional, side view of theoptical module 30, and FIG. 6 is a cross section of the optical module30 as similar to FIG. 3. The optical module 30 includes a PLC 4A, asemicut ferrule assembly 16, and a glass plate 34 having a V groove 36.The PLC 4A includes a silicon substrate 6 and an optical waveguide layer8. The optical waveguide layer 8 of the PLC 4A includes an opticalwaveguide core 10 and an optical waveguide cladding 12. The opticalwaveguide cladding 12 is partially removed to form a narrow portion 8 ain which the optical waveguide core 10 extends. The optical waveguidecore 10 extends over the length of the silicon substrate 6.

The upper surface of the silicon substrate 6 is exposed on the oppositesides of the narrow portion 8 a of the optical waveguide layer 8, and apair of marker grooves 32 for positioning to the glass plate 34 areformed by etching on this exposed upper surface of the silicon substrate6. The semicut ferrule assembly 16 is similar in structure to that ofthe optical module 2 according to the first preferred embodiment. The Vgroove 36 is formed on the lower surface of the glass plate 34 so as toextend over the length thereof. A pair of marker grooves 38 forpositioning to the PLC 4A are also formed on the lower surface of theglass plate 34 so as to extend over the length thereof. The V groove 36and the marker grooves 38 are formed by cutting or glass molding, forexample.

As best shown in FIG. 6, the glass plate 34 and the PLC 4A are fixedtogether by an adhesive in such a manner that the narrow portion 8 a ofthe optical waveguide layer 8 is accommodated in the V groove 36 of theglass plate 34, and that the marker grooves 32 of the PLC 4A arevertically aligned with the marker grooves 38 of the glass plate 34. Onthe other hand, the glass plate 34 and the semicut ferrule assembly 16are fixed together by an adhesive in such a manner that the bare opticalfiber 22 exposed to the flat cut portion 24 of the ferrule 18 is fittedinto the V groove 36 of the glass plate 34 to effect self-alignedpositioning.

A gap of about 10 μm is defined between the flat cut portion 24 of theferrule assembly 16 and the lower surface of the glass plate 34, and theadhesive is charged into the gap to thereby fix the glass plate 34 andthe ferrule assembly 16. The shape and size of the V groove 36 and theposition of the V groove 36 relative to the marker grooves 32 and 38 areset so that the optical waveguide core 10 is aligned with the core 28 ofthe bare optical fiber 22, shown in FIG. 6.

The optical module 30 according to the second preferred embodiment hasthe following advantages.

(1) It is not necessary to form a V groove on the PLC substrate 6, butthe semicut ferrule assembly 16 is connected through the V-grooved glassplate 34 to the PLC 4A, thereby realizing low-loss optical connection ata low cost.

(2) It is not necessary to provide adhesive bonding areas on theopposite sides of the diametrical portion of the ferrule 18 on the PLCsubstrate (the silicon substrate) 6, so that the width of the PLCsubstrate 6 can be reduced.

(3) The bare optical fiber 22 does not project from the ferrule 18, sothat there is no possibility of breaking of the optical fiber 22 inassembling the optical module 30, thereby improving the worker safetyand yield rate.

(4) The bare optical fiber 22 is fixed by adhesion in the ferrule 18 soas to prevent generation of fiber bends, so that the stability againsttemperature variations or the like can be ensured to thereby attain highreliability with less characteristics variations.

Referring to FIG. 7, there is shown a perspective view of a semicutferrule assembly 16A according to another preferred embodiment of thepresent invention. The ferrule assembly 16A includes a cylindricalferrule 18 having a through hole 20 and a bare optical fiber 22 insertedand fixed in the through hole 20. The ferrule 18 has a cylindricalintermediate portion and a pair of flat cut portions 24 formed at theopposite end portions for semicylindrically exposing the opposite endportions of the optical fiber 22.

FIGS. 8A, 8B, and 8C show semicut ferrule assemblies 16B, 16C, and 16D,respectively, according to other preferred embodiments of the presentinvention. The ferrule assembly 16B shown in FIG. 8A is different fromthe ferrule assembly 16 shown in FIG. 1 in only the point that the widthof the flat cut portion 24 is reduced. The ferrule assembly 16C shown inFIG. 8B is different from the ferrule assembly 16B shown in FIG. 8A inonly the point that the width of the flat cut portion 24 is reduced. Theferrule assembly 16D shown in FIG. 8C is different from the ferruleassembly 16 shown in FIG. 1 in only the point that the cylindricalportion of the ferrule 18 is formed at one end thereof with a taper 40.The ferrule assembly 16D is effective in configuring a compactwavelength filter module to be hereinafter described.

FIGS. 9A and 9B show semicut ferrule assemblies 16E and 16F,respectively, according to still other preferred embodiments of thepresent invention. The ferrule assembly 16E shown in FIG. 9A is similarto the ferrule assembly 16A shown in FIG. 7 except that a rectangularprismatic ferrule 42 is adopted. That is, the ferrule assembly 16Eincludes the ferrule 42 having a through hole 44 and a bare opticalfiber 22 inserted in the through hole 44. The ferrule 42 has arectangular prismatic intermediate portion and a pair of flat cutportions 46 formed at the opposite end portions for semicylindricallyexposing the opposite end portions of the optical fiber 22.

The ferrule assembly 16F shown in FIG. 9B is similar to the ferruleassembly 16E shown in FIG. 9A except that a plurality of bare opticalfibers 22 are inserted and fixed in a plurality of through holes 44extending through a rectangular prismatic ferrule 42′. Thus, the outsideshape of the ferrule used in the present invention is not necessarilycylindrical for the connection of a PLC and an optical element or theconnection of a PLC and another PLC. The preferred embodiments shown inFIGS. 9A and 9B intended for size reduction are effective in providinghigh-density optical connection.

Referring to FIG. 10, there is shown a coupling structure of differenttypes of ferrules. By combining two semicut ferrules 18 and 18′different in diameter, a ferrule structure for converting an externalsize can be simply obtained. This structure is excellent in reliabilitybecause no bending of the bare optical fiber 22 occurs.

Referring to FIG. 11, there is shown a perspective view of an opticalmodule 50 according to a third preferred embodiment of the presentinvention. The optical module 50 includes a V-grooved PLC 4B, a semicutferrule assembly 16, and an optical element 52. The PLC 4B includes asilicon substrate 6 and an optical waveguide layer 8 formed on anintermediate portion of the silicon substrate 6. The ferrule assembly 16is mounted on one end portion of the silicon substrate 6, and theoptical element 52 is mounted on the other end portion of the siliconsubstrate 6.

The optical element 52 is a laser diode or a photodiode, for example,and it is mounted on the substrate 6 so as to be optically coupled tothe optical waveguide core 10 of the optical waveguide layer 8.Electrodes 54 for the optical element 52 are also formed on the otherend portion of the substrate 6. The one end portion of the substrate 6of the PLC 4B is formed with a V groove 14 aligned with the opticalwaveguide core 10 in the layer 8. The flat cut portion 24 of the ferruleassembly 16 is bonded to the one end portion of the substrate 6 so thatthe bare optical fiber 22 is engaged with the V groove 14 of thesubstrate 6. Accordingly, the core of the optical fiber 22 issubstantially aligned with the optical waveguide core 10, therebyrealizing low-loss optical coupling.

The one end portion of the silicon substrate 6 to which the flat cutportion 24 of the ferrule assembly 16 is bonded is further formed with aplurality of grooves 56 for receiving an adhesive. The grooves 56 extendover the width of the substrate 6 in perpendicular relationship to the Vgroove 14. An optical functional circuit such as a wavelength filter,optical branching circuit, optical modulator, and optical switch isincorporated in the optical waveguide layer 8. A plurality of opticalelements or an optical element array rather than the single opticalelement 52 may be mounted on the substrate 6. Further, a plurality ofsemicut ferrule assemblies rather than the single semicut ferruleassembly 16 may be mounted on the substrate 6.

Referring to FIG. 12, there is shown a perspective view of an opticalmodule 58 according to a fourth preferred embodiment of the presentinvention. The optical module 58 includes a V-grooved PLC 4C and a pairof semicut ferrule assemblies 16. The PLC 4C includes a siliconsubstrate 6 and an optical waveguide layer 8 formed on an intermediateportion of the silicon substrate 6. The pair of ferrule assemblies 16are mounted on the opposite end portions of the silicon substrate 6. Theopposite end portions of the substrate 6 of the PLC 4C are formed with apair of V grooves 14 each aligned with the optical waveguide core 10 inthe layer 8. The flat cut portions 24 of the ferrule assemblies 16 arebonded to the opposite end portions of the substrate 6 so that the bareoptical fibers 22 of the ferrule assemblies 16 are engaged with the Vgrooves 14 formed on the opposite end portions of the substrate 6.Accordingly, the core of the optical fiber 22 of each ferrule assembly16 is substantially aligned with the optical waveguide core 10, therebyrealizing low-loss optical coupling.

Each end portion of the silicon substrate 6 to which the flat cutportion 24 of each ferrule assembly 16 is bonded is further formed witha plurality of grooves 56 for receiving an adhesive. The grooves 56formed on each end portion of the substrate 6 extend over the width ofthe substrate 6 in perpendicular relationship to the V groove 14 formedon the same end portion of the substrate 6. An optical functionalcircuit such as a wavelength filter, optical branching circuit, opticalmodulator, and optical switch is incorporated in the optical waveguidelayer 8.

Referring to FIG. 13, there is shown a perspective view of an opticalmodule 60 according to a fifth preferred embodiment of the presentinvention. The optical module 60 includes a V-grooved silicon substrate6, a semicut ferrule assembly 16, and an optical element 52. The ferruleassembly 16 is mounted on one end portion of the silicon substrate 6,and the optical element 52 is mounted on the other end portion of thesilicon substrate 6 so as to be optically coupled to the bare opticalfiber 22 of the ferrule assembly 16. Electrodes 54 for the opticalelement 52 are formed on the other end portion of the substrate 6.

The one end portion of the substrate 6 is formed with a V groove 14aligned with an active layer of the optical element 52. The flat cutportion 24 of the ferrule assembly 16 is bonded to the one end portionof the substrate 6 so that the bare optical fiber 22 is engaged with theV groove 14 of the substrate 6. Accordingly, the core of the opticalfiber 22 is substantially aligned with the active layer of the opticalelement 52, thereby realizing low-loss optical coupling. The one endportion of the silicon substrate 6 to which the flat cut portion 24 ofthe ferrule assembly 16 is bonded is further formed with a plurality ofgrooves 56 for receiving an adhesive. The grooves 56 extend over thewidth of the substrate 6 in perpendicular relationship to the V groove14. A plurality of optical elements or an optical element array ratherthan the single optical element 52 may be mounted on the substrate 6.

Referring to FIG. 14, there is shown a perspective view of an opticalmodule 62 according to a sixth preferred embodiment of the presentinvention. The optical module 62 includes a V-grooved silicon substrate6, a pair of semicut ferrule assemblies 16, and an optical element 52.The pair of ferrule assemblies 16 are mounted on the opposite endportions of the silicon substrate 6. The optical element 52 is mountedon an intermediate portion of the silicon substrate 6 so as to besandwiched between the pair of ferrule assemblies 16. Electrodes 54 forthe optical element 52 are formed on the intermediate portion of thesilicon substrate 6.

The opposite end portions of the substrate 6 are formed with a pair of Vgrooves 14 each aligned with an active layer of the optical element 52.The flat cut portions 24 of the ferrule assemblies 16 are bonded to theopposite end portions of the substrate 6 so that the bare optical fibers22 of the ferrule assemblies 16 are engaged with the V grooves 14 formedon the opposite end portions of the substrate 6. Accordingly, the coreof the optical fiber 22 of each ferrule assembly 16 is substantiallyaligned with the active layer of the optical element 52, therebyrealizing low-loss optical coupling. Each end portion of the siliconsubstrate 6 to which the flat cut portion 24 of each ferrule assembly 16is bonded is further formed with a plurality of grooves (not shown) forreceiving an adhesive.

Referring to FIG. 15, there is shown a perspective view of an opticalmodule 64 according to a seventh preferred embodiment of the presentinvention. The optical module 64 includes a V-grooved silicon substrate6, a pair of semicut ferrule assemblies 16, and a thin-film orthin-sheet passive optical component 68. The pair of ferrule assemblies16 are mounted on the opposite end portions of the silicon substrate 6.The passive optical component 68 is vertically inserted and fixed in arectangular groove 66 formed at an intermediate portion of the siliconsubstrate 6 so as to be sandwiched between the pair of ferruleassemblies 16. The rectangular groove 66 extends over the width of thesilicon substrate 6. The opposite end portions of the substrate 6 areformed with a pair of V grooves 14 aligned with each other. The flat cutportions 24 of the ferrule assemblies 16 are bonded to the opposite endportions of the substrate 6 so that the bare optical fibers 22 of theferrule assemblies 16 are engaged with the V grooves 14 formed on theopposite end portions of the substrate 6. Accordingly, the cores of theoptical fibers 22 positioned in the V grooves 14 are substantiallyaligned with each other, thereby realizing low-loss optical coupling.

The passive optical component 68 in the form of thin film or thin sheetfixed in the rectangular groove 66 projects from the upper surface ofthe silicon substrate 6, and the opposite side surfaces of the passiveoptical component 68 at its projecting portion are sandwiched betweenthe opposite end faces of the ferrule assemblies 16 and bonded thereto.Accordingly, a large bonding area of the passive optical component 68 isensured, and it is supported from the opposite sides by the ferruleassemblies 16, thereby obtaining a high fixing strength to stabilize thepassive optical component 68. Each end portion of the silicon substrate6 to which the flat cut portion 24 of each ferrule assembly 16 is bondedis further formed with a plurality of grooves (not shown) for receivingan adhesive.

Referring to FIG. 16, there is shown a perspective view of an opticalmodule 70 according to an eighth preferred.embodiment of the presentinvention. The optical module 70 includes a V-grooved PLC 4D, a pair ofsemicut ferrule assemblies 16 a and 16 b, an optical element 52, and athin-film optical wavelength filter 84. The PLC 4D includes a V-groovedsilicon substrate 6 and an optical waveguide layer 72 formed on anintermediate portion of the silicon substrate 6. The optical waveguidelayer 72 is a Y-branch type optical waveguide including a first opticalwaveguide core 74, a second optical waveguide core 76 connected to anintermediate portion of the first optical waveguide core 74, and anoptical waveguide cladding 78 covering the first and second opticalwaveguide cores 74 and 76. The pair of ferrule assemblies 16 a and 16 bare mounted on one end portion of the silicon substrate 6, and theoptical element 52 is mounted on the other end portion of the siliconsubstrate 6. Electrodes 54 for the optical element 52 are formed on theother end portion of the silicon substrate 6.

The thin-film optical wavelength filter 84 is vertically inserted andfixed in a rectangular groove 82 cut through the optical waveguide layer72 into the substrate 6 so as to intersect a Y branch 80 of the Y-branchtype optical waveguide, i.e., a junction between the first opticalwaveguide core 74 and the second optical core 76. The rectangular groove82 extends over the width of the substrate 6. The one end portion of thesilicon substrate 6 is formed with a pair of V grooves 14 aligned withthe first and second optical waveguide cores 74 and 76. The flat cutportions 24 of the ferrule assemblies 16 a and 16 b are bonded to theone end portion of the substrate 6 so that the bare optical fibers 22 ofthe ferrule assemblies 16 a and 16 b are engaged with the V grooves 14formed on the one end portion of the substrate 6. Accordingly, the coreof the optical fiber 22 of the ferrule assembly 16 a is substantiallyaligned with the first optical waveguide core 74, and the core of theoptical fiber 22 of the ferrule assembly 16 b is substantially alignedwith the second optical waveguide core 76, thereby realizing low-lossoptical coupling.

The one end portion of the silicon substrate 6 to which the flat cutportions 24 of the ferrule assemblies 16 a and 16 b are bonded isfurther formed with a plurality of grooves (not shown) for receiving anadhesive. For example, a certain component of light entered the firstoptical waveguide core 74 from the ferrule assembly 16 a is transmittedby the wavelength filter 84 to enter the optical element 52, and theremaining component of the light is reflected by the wavelength filter84 to enter the second optical waveguide core 76 and to emerge from theferrule assembly 16 b.

Referring to FIG. 17, there is shown a perspective view of an opticalmodule 86 according to a ninth preferred embodiment of the presentinvention. Like the eighth preferred embodiment mentioned above, theoptical module 86 includes a V-grooved PLC 4E, a pair of semicut ferruleassemblies 16 a and 16 b, an optical element 52, and a thin-film opticalwavelength filter 84. The PLC 4E includes a V-grooved silicon substrate6 and an optical waveguide layer 72 formed on an intermediate portion ofthe silicon substrate 6. The optical waveguide layer 72 has the samestructure as that in the eighth preferred embodiment shown in FIG. 16.The pair of ferrule assemblies 16 a and 16 b are mounted on the oppositeend portions of the silicon substrate 6, and the optical element 52 ismounted on one end portion of the silicon substrate 6 where the ferruleassembly 16 a is mounted. Electrodes 54 for the optical element 52 areformed on the one end portion of the silicon substrate 6. The thin-filmoptical wavelength filter 84 is vertically inserted and fixed in arectangular groove 82 as similar to the structure in the eighthpreferred embodiment shown in FIG. 16.

The opposite end portions of the silicon substrate 6 are formed with apair of V grooves 14 aligned with the opposite ends of the first opticalwaveguide core 74. The flat cut portions 24 of the ferrule assemblies 16a and 16 b are bonded to the opposite end portions of the substrate 6 sothat the bare optical fibers 22 of the ferrule assemblies 16 a and 16 bare engaged with the V grooves 14 formed on the opposite end portions ofthe substrate 6. Accordingly, the core of the optical fiber 22 of theferrule assembly 16 a is substantially aligned with the first end of thefirst optical waveguide core 74, and the core of the optical fiber 22 ofthe ferrule assembly 16 b is substantially aligned with the second endof the first optical waveguide core 74, thereby realizing low-lossoptical coupling. Each of the opposite end portions of the siliconsubstrate 6 to which the flat cut portions 24 of the ferrule assemblies16 a and 16 b are bonded is further formed with a plurality of grooves(not shown) for receiving an adhesive.

For example, a certain component of light entered the first opticalwaveguide core 74 from the ferrule assembly 16 a is reflected by thewavelength filter 84 to enter the optical element 52 through the secondwaveguide core 76, and the remaining component of the light istransmitted by the wavelength filter 84 to enter the ferrule assembly 16b and to emerge therefrom. In the case that the optical element 52 is alight emitting element such as a laser diode, a certain component oflight emitted from the optical element 52 is reflected by the wavelengthfilter 84 to enter the ferrule assembly 16 a and to emerge therefrom,and the remaining component of the light is transmitted by thewavelength filter 84 to enter the ferrule assembly 16 b and to emergetherefrom.

Referring to FIG. 18, there is shown a perspective view of an opticalmodule 88 according to a tenth preferred embodiment of the presentinvention. Like the eighth and ninth preferred embodiments mentionedabove, the optical module 88 includes a V-grooved PLC 4F, a semicutferrule assembly 16, a pair of optical elements 52 a and 52 b, and athin-film optical wavelength filter 84. The PLC 4F includes a V-groovedsilicon substrate 6 and an optical waveguide layer 72 formed on anintermediate portion of the silicon substrate 6. The optical waveguidelayer 72 has the same structure as that in the eighth preferredembodiment shown in FIG. 16. The ferrule assembly 16 and the opticalelement 52 a are mounted on one end portion of the silicon substrate 6,and the optical element 52 b is mounted on the other end portion of thesilicon substrate 6. Electrodes 54 for the optical element 52 a areformed on the one end portion of the silicon substrate 6, and electrodes54 for the optical element 52 b are formed on the other end portion ofthe silicon substrate 6. The thin-film optical wavelength filter 84 isvertically inserted and fixed in a rectangular groove 82 as similar tothe structure in the eighth preferred embodiment shown in FIG. 16. Forexample, the wavelength filter 84 transmits light having wavelengths ina 1.55 μm band, and reflects light having wavelengths in a 1.3 μm band.

The one end portion of the silicon substrate 6 is formed with a V groove14 aligned with the first end of the first optical waveguide core 74.The flat cut portion 24 of the ferrule assembly 16 is bonded to the oneend portion of the substrate 6 so that the bare optical fiber 22 of theferrule assembly 16 is engaged with the V groove 14 formed on the oneend portion of the substrate 6. Accordingly, the core of the opticalfiber 22 of the ferrule assembly 16 is substantially aligned with thefirst end of the first optical waveguide core 74, thereby realizinglow-loss optical coupling. The one end portion of the silicon substrate6 to which the flat cut portion 24 of the ferrule assembly 16 is bondedis further formed with a plurality of grooves (not shown) for receivingan adhesive.

For example, a certain component of light entered the first opticalwaveguide core 74 from the ferrule assembly 16 is reflected by thewavelength filter 84 to enter the optical element 52 a, and theremaining component of the light is transmitted by the wavelength filter84 to enter the optical element 52 b. In the case that the opticalelement 52 a is a light emitting element such as a laser diode, acertain component of light emitted from the optical element 52 a isreflected by the wavelength filter 84 to enter the ferrule assembly 16and to emerge therefrom, and the remaining component of the light istransmitted by the wavelength filter 84 to enter the optical element 52b.

Referring to FIG. 19, there is shown a perspective view of an opticalmodule 90 according to an eleventh preferred embodiment of the presentinvention. The optical module 90 includes a V-grooved silicon substrate6, a semicut ferrule assembly 16A similar to that shown in FIG. 7, andan optical element 52. The silicon substrate 6 is formed at its one endportion with a V groove 14. The ferrule assembly 16A is mounted on thesilicon substrate 6 in such a manner that one of the two cut flatportions 24 of the ferrule assembly 16A is bonded to the one end portionof the substrate 6 in the condition where the bare optical fiber 22 isengaged with the V groove 14. By connecting the optical module 90 at theother flat cut portion 24 to a PLC (not shown), an optical functionalsystem can be simply configured.

Referring to FIG. 20, there is shown a perspective view of an opticalmodule 92 according to a twelfth preferred embodiment of the presentinvention. The optical module 92 is configured by connecting two opticalmodules each similar to the optical module 90 shown in FIG. 19 to a PLC4G at one end portion thereof. A semicut ferrule assembly 16 is mountedon the other end portion of the PLC 4G. In modification, a wavelengthfilter or an optical switch circuit may be mounted in the opticalwaveguide layer 8 of the PLC 4G.

Referring to FIG. 21, there is shown a perspective view of an opticalmodule 94 according to a thirteenth preferred embodiment of the presentinvention. The optical module 94 includes a V-grooved silicon substrate6, a bare optical fiber 22, and an optical element 52. A V groove 14 isformed on the upper surface of the silicon substrate 6 at one endportion thereof by anisotropic etching of silicon. The bare opticalfiber 22 is fitted in the V groove 14 of the substrate 6, and theoptical element 52 is mounted on the upper surface of the substrate 6 soas to be substantially aligned with the core of the optical fiber 22.The size of the V groove 14 is set so that the core of the optical fiber22 fitted in the V groove 14 is optically coupled to the optical element52. A rectangular groove 96 perpendicular to the V groove 14 is formedby cutting on the upper surface of the substrate 6, so as to eliminate aslant portion formed at one end of the V groove 14 opposed to theoptical element 52.

Referring to FIG. 22A, there is shown a perspective view of an opticalmodule 98 according to a fourteenth preferred embodiment of the presentinvention. The optical module 98 includes a V-grooved silicon substrate6, a pair of bare optical fibers 22, and an optical element 52′. A pairof V grooves 14 aligned with each other are formed on the upper surfaceof the silicon substrate 6 at its opposite end portions. The bareoptical fibers 22 are fitted in the V grooves 14 of the substrate 6, andthe optical element 52′ is mounted on the upper surface of the substrate6 at its intermediate portion so as to be substantially aligned with thecores of the optical fibers 22. The size of each V groove 14 is set sothat the cores of the optical fibers 22 are optically coupled to theoptical element 52′. A pair of rectangular grooves 96 for the V grooves14 are formed on the upper surface of the substrate 6 as similarly tothe preferred embodiment shown in FIG. 21. For example, the opticalelement 52′ is an LD amplifier which amplifies an optical signal.

FIG. 22B shows an optical module 100 as a modification of the preferredembodiment shown in FIG. 22A. The optical module 100 differs from theoptical module 98 shown in FIG. 22A in only the point that two pairs ofbare optical fibers 22 are fitted in two pairs of V grooves 14, and thata pair of optical elements 52′ are mounted on the silicon substrate 6.

Referring to FIG. 23, there is shown a perspective view of an opticalmodule 102 according to a fifteenth preferred embodiment of the presentinvention. The optical module 102 includes a silicon substrate 6 havinga V groove 14, a semicut ferrule assembly 16D having a taper 40 similarto that shown in FIG. 8C, and an optical element 52. The semicut ferruleassembly 16D is mounted on the silicon substrate 6 so that the opticalfiber 22 of the ferrule assembly 16D is fitted in the V groove 14 of thesubstrate 6, and the optical element 52 is mounted on the substrate 6 soas to be optically coupled to the core of the optical fiber 22 fitted inthe V groove 14.

Referring to FIG. 24, there is shown a plan view of an optical module104 according to a sixteenth preferred embodiment of the presentinvention. The optical module 104 includes a substrate 105, twocylindrical ferrule assemblies 112 a and 112 b, two semicut ferruleassemblies 16D1 and 16D2, two optical elements 52 a and 52 b, and awavelength filter 110.

Two grooves 106 and 108 orthogonal to each other are formed on the uppersurface of the substrate 105. The cylindrical ferrule assemblies 112 aand 112 b each having a tapered front end are inserted in the grooves106 and 108, respectively. The semicut ferrule assemblies 16D1 and 16D2each having a tapered front end are inserted in the grooves 108 and 106,respectively. Thus, the ferrule assemblies 112 a and 16D2 are insertedin the groove 106 in such a manner that their respective tapered frontends are opposed to each other, and the ferrule assemblies 112 b and16D1 are inserted in the groove 108 in such a manner that theirrespective tapered front ends are opposed to each other. Although notshown, optical fibers are inserted and fixed in the through holes of theferrule assemblies 112 a, 112 b, 16D1, and 16D2. The wavelength filter110 is inserted and fixed in a groove formed on the upper surface of thesubstrate 105 so as to be inclined 45° with respect to the grooves 106and 108. The optical elements 52 a and 52 b are mounted on siliconsubstrates 6 on which the ferrule assemblies 16D1 and 16D2 are mounted.

Incident light from the cylindrical ferrule assembly 112 a istransmitted and reflected by the wavelength filter 110, wherein atransmitted component of the light enters the optical element 52 bthrough the ferrule assembly 16D2 and a reflected component of the lightenters the optical element 52 a through the ferrule assembly 16D1. Onthe other hand, incident light from the cylindrical ferrule assembly 112b is also transmitted and reflected by the wavelength filter 110,wherein a transmitted component of the light enters the optical element52 a through the ferrule assembly 16D1 and a reflected component of thelight enters the optical element 52 b through the ferrule assembly 16D2.In the case that the optical element 52 a is a light emitting elementand the optical element 52 b is a photodetecting element, abidirectional wavelength division multiplexing optical transmissionmodule can be simply fabricated, and the module can be reduced in size.

Referring to FIG. 25, there is shown a perspective view of an opticalmodule 114 according to a seventeenth preferred embodiment of thepresent invention. The optical module 114 includes a substrate 116, anLD amplifier array 118, a pair of semicut ferrule assemblies 16F′, apair of PLCs 4H and 4H′, and a plurality of semicut ferrule assemblies16. The LD amplifier array 118 is mounted on the substrate 116. Thesemicut ferrule assemblies 16F′ are mounted on the substrate 116 withthe LD amplifier array 118 interposed therebetween. Each ferruleassembly 16F′ is similar to the ferrule assembly 16F shown in FIG. 9B.The ferrule assemblies 16F′ are mounted also on the substrates 6 of thePLCs 4H and 4H′. Thus, the LD amplifier array 118 is optically connectedthrough the ferrule assemblies 16F′ to the PLCs 4H and 4H′.

The semicut ferrule assemblies 16 are mounted on the substrate 6 of eachof the PLCs 4H and 4H′so as to be optically connected to the opticalwaveguide layer 8 of each of the PLCs 4H and 4H′. For example, opticalsignals input through the left ferrule assemblies 16 into the PLC 4H areamplified by the LD amplifier array 118, and amplified optical signalsfrom the LD amplifier array 118 are input into the PLC 4H′ and outputfrom the right ferrule assemblies 16.

Referring to FIG. 26, there is shown a perspective view of an opticalmodule 120 according to an eighteenth preferred embodiment of thepresent invention. The optical module 120 includes a V-grooved PLC 4I, aplurality of semicut ferrule assemblies 16 each having a largerdiameter, and a plurality of semicut ferrule assemblies 16′ each havinga smaller diameter. The ferrule assemblies 16 are mounted on one endportion of the substrate 6 of the PLC 4I, and the ferrule assemblies 16′are mounted on the other end portion of the substrate 6. The ferruleassemblies 16 are arranged with a pitch larger than that of the ferruleassemblies 16′. Thus, the external size and pitch of plural ferruleassemblies can be freely changed.

Referring to FIG. 27, there is shown a perspective view of an opticalmodule 122 according to a nineteenth preferred embodiment of the presentinvention. FIG. 28 shows a PLC 4J used in the nineteenth preferredembodiment, and FIG. 29A is a glass plate 34 used in the nineteenthpreferred embodiment. As shown in FIG. 28, the PLC 4J includes a siliconsubstrate 6 and an optical waveguide layer 8 formed on the siliconsubstrate 6. The optical waveguide layer 8 has a pair of narrow portions8 a and 8 b at the opposite end portions formed by partially cutting thecladding region.

A pair of marker grooves 32 for positioning to the glass plate 34 areformed on the opposite sides of the narrow waveguide portion 8 a on theupper surface of the substrate 6, and a pair of marker grooves 33 forpositioning to another member (not shown) are formed on the oppositesides of the narrow waveguide portion 8 b on the upper surface of thesubstrate 6. The substrate 6 has no V groove in this preferredembodiment.

As shown in FIG. 29A, the glass plate 34 has a V groove 36 formed bycutting or the like and a pair of marker grooves 38 formed by cutting orthe like on the opposite sides of the V groove 36. The PLC 4J and theglass plate 34 are bonded together with a high dimensional accuracy by apassive alignment technique in such a manner that the marker grooves 32of the PLC 4J are vertically aligned with the marker grooves 38 of theglass plate 34, and that the narrow waveguide portion 8 a of the PLC 4Jis accommodated in the V groove 36 of the glass plate 34.

The glass plate 34 and the semicut ferrule assembly 16 are bondedtogether in such a manner that the bare optical fiber 22 of the ferruleassembly 16 is fitted in the V groove 36 of the glass plate 34 to effectpositioning by a self alignment technique, and that the flat cut portion24 of the ferrule assembly 16 is bonded to the glass plate 34. Althoughthe PLC 4J has no V groove, high-precision optical coupling between thebare optical fiber 22 of the ferrule assembly 16 and the opticalwaveguide core of the PLC 4J can be relatively simply obtained by usingthe V-grooved glass plate 34. In the case that the width of the narrowwaveguide portion 8 a is relatively small, the glass plate 34 shown inFIG. 29A is used, whereas in the case that the width of the narrowwaveguide portion 8 a is relatively large, a glass plate 34′ having awide groove 124 shown in FIG. 29B is used. In the latter case, thenarrow waveguide portion 8 a is accommodated in the wide groove 124.

Referring to FIG. 30A, there is shown an exploded perspective view of anoptical module 126 according to a twentieth preferred embodiment of thepresent invention. FIG. 30B is a perspective view of the optical module126 in its assembled condition. The optical module 126 includes aV-grooved PLC 4K and a multifiber semicut connector 128. The PLC 4Kincludes a silicon substrate 6 and an optical waveguide layer 8 formedon the silicon substrate 6. The optical waveguide layer 8 includes aY-branched optical waveguide core 10 and an optical waveguide cladding12 covering the core 10. The Y-branched optical waveguide core 10consists of a first core portion 10 a and a second core portion 10 bconnected to an intermediate portion of the first core portion 10 a. Anoptical signal propagates in the optical waveguide core 10 having arefractive index higher than that of the optical waveguide cladding 12.

The silicon substrate 6 has an exposed surface 6 a formed with two Vgrooves 14 respectively aligned with the first and second core portions10 a and 10 b. The multifiber semicut connector 128 has two bare opticalfibers 22 optically coupled to the first and second core portions 10 aand 10 b. The position and size of the V grooves 14 are set so that whenthe bare optical fibers 22 are fitted in the V grooves 14, the cores ofthe optical fibers 22 are substantially aligned with the first andsecond core portions 10 a and 10 b of the Y-branched optical waveguidecore 10.

The multifiber semicut connector 128 includes a block 130 having twothrough holes in which the two optical fibers 22 are inserted and fixed.The block 130 has a flat cut portion 132 for semicylindrically exposingthe optical fibers 22. The block 130 having the flat cut portion 132 isformed by transfer molding of plastic using a mold. The bare opticalfibers 22 are inserted in the through holes of the block 130 and bondedthereto at its portion except the flat cut portion 132. A pair of guidepins 134 are inserted and fixed in other through holes formed in theblock 130. The insertion and fixing of the guide pins 134 may be carriedout after connecting the PLC 4K to the multifiber semicut connector 128.

The PLC 4K is bonded at the exposed surface 6 a to the flat cut portion132 of the multifiber semicut connector 128 so that the optical fibers22 of the connector 128 are fitted in the V grooves 14 of the PLC 4K.Accordingly, the cores of the optical fibers 22 are substantiallyaligned with the first and second core portions 10 a and 10 b of theY-branched optical waveguide core 10, thereby realizing low-loss opticalcoupling. The exposed surface 6 a of the silicon substrate 6 of the PLC4K to which the flat cut portion 132 of the connector 128 is bonded isfurther formed with a plurality of grooves 56 for receiving an adhesive.

The optical module 126 according to this preferred embodiment can solvethe problems in the conventional receptacle structure, and has thefollowing advantages.

(1) It is not necessary to form deep V grooves for mounting the guidepins 134 on the PLC substrate 6, so that the PLC substrate 6 can bereduced in thickness and width to thereby reduce material cost.

(2) It is not necessary to provide a pressure plate for fixing the bareoptical fibers 22 to the block 130, so that the number of parts andassembly cost can be minimized.

(3) Dimensional errors of each V groove 14 and each bare optical fiber22 are small, so that a misalignment between each of the first andsecond core portions 10 a and 10 b and the core of the correspondingbare optical fiber 22 can be reduced, thereby minimizing an opticalcoupling loss.

Referring to FIG. 31, there is shown an exploded perspective view of anoptical module 136 according to a twenty-first preferred embodiment ofthe present invention. The optical module 136 differs from the opticalmodule 126 shown in FIG. 30A in only the structure of a PLC 4L. The PLC4L includes a V-grooved silicon substrate 6 having exposed surfaces 6 aand 6 b at the opposite end portions, and an optical waveguide layer 8formed on an intermediate portion of the silicon substrate 6. Two Vgrooves 14 are formed on the exposed surface 6 a of the substrate 6, andthree optical elements 52 a, 52 b, and 52 c are mounted on the exposedsurface 6 b of the substrate 6. The optical waveguide layer 8 includes aY-branched optical waveguide core 10 and an optical waveguide cladding12 covering the core 10. The optical waveguide core 10 includes firstand second core portions 10 a and 10 b respectively aligned with the twoV grooves 14, and third and fourth core portions 10 c and 10 drespectively aligned with the optical elements 52 a and 52 b. Forexample, the optical element 52 a is a laser diode, the optical element52 b is a photodiode for detection of an optical signal, and the opticalelement 52 c is a photodiode for monitoring of light. Reference numerals54 are electrodes for the optical elements 52 a, 52 b, and 52 c.

Referring to FIG. 32, there is shown a perspective view of a multifibersemicut connector 138 according to another preferred embodiment. Themultifiber semicut connector 138 differs from the connector 128 shown inFIG. 30A in only the point that 140 a groove 140 is additionally formed.The groove 140 is formed on the flat cut portion 132 near the boundarybetween the exposed part of the optical fibers 22 and the unexposed partof the optical fibers 22 so as to extend in a direction perpendicular tothe optical fibers 22. The groove 140 has a width of 0.1 to 1 mm, forexample, and is slightly lowered from the horizontal upper surface ofthe flat cut portion 132. In fixing the optical fibers 22 inserted inthe through holes of the block 130 by means of an adhesive, the groove140 functions to receive the adhesive leaked from the through holes,thereby preventing the adhesive from sticking to the horizontal surfaceof the flat cut portion 132 where the exposed part of the optical fibers22 is placed.

Referring to FIG. 33, there is shown an exploded perspective view of anoptical module 142 according to a twenty-second preferred embodiment ofthe present invention. The optical module 142 includes a multifibersemicut connector 128′ and a PLC 4K′. The multifiber semicut connector128′ is similar to the connector 128 shown in FIG. 30A except that thebare optical fibers 22 of the connector 128′ project from the block 130by about 0.1 to 2 mm. The PLC 4K′ is similar to the PLC 4K shown in FIG.30A except that the exposed surface 6 a of the PLC 4K′ is longer thanthat of the PLC 4K. By projecting the optical fibers 22 from the block130, a space between the front ends of the optical fibers 22 and thefirst and second core portions 10 a and 10 b of the optical waveguidecore 10 or optical elements (not shown) can be easily controlled.

Referring to FIG. 34, there is shown an exploded perspective view of anoptical module 144 according to a twenty-third preferred embodiment ofthe present invention. The optical module 144 includes a semicut ferruleassembly 16F similar to that shown in FIG. 9B, a PLC 4K similar. to thatshown in FIG. 30A, a substrate 146 having two V grooves 148, and twooptical elements 52 mounted on the substrate 146. The two opticalelements 52 are aligned with the two V grooves 148, respectively. Aplurality of grooves 150 for receiving an adhesive are also formed onthe substrate 146. The grooves 150 extend over the width of thesubstrate 146 in perpendicular relationship to the V grooves 148.

The PLC 4K is bonded to the flat cut portion 46 formed at one endportion of the ferrule assembly 16F so that an exposed part of theoptical fibers 22 of the ferrule assembly 16F is fitted in the V grooves14 of the PLC 4K. On the other hand, the substrate 146 is bonded to theother flat cut portion 46 of the ferrule assembly 16F so that the otherexposed part of the optical fibers 22 of the ferrule assembly 16F isfitted in the V grooves 148 of the substrate 146. According to thispreferred embodiment, the optical elements 52 mounted on the substrate146 are optically coupled through the ferrule assembly 16F to the PLC4K.

Referring to FIG. 35A, there is shown an exploded perspective view of anoptical module 152 according to a twenty-fourth preferred embodiment ofthe present invention. FIG. 35B is a perspective view of the opticalmodule 152 in its assembled condition. The optical module 152 includes aV-grooved PLC 4M and two multifiber semicut connectors 126′ and 154optically coupled to each other through the PLC 4M.

The PLC 4M includes a silicon substrate 6 and an optical waveguide layer8 formed on an intermediate portion of the substrate 6. The substrate 6has an exposed surface 6 a at one end portion and another exposedsurface 6 b at the other end portion. The exposed surface 6 a is formedwith two V grooves 14, and the exposed surface 6 b is formed with atleast four V grooves 14. The optical waveguide layer 8 includes twoY-branch type (1×N branch type where N is an integer greater than 1)optical waveguide cores 10 and an optical waveguide cladding 12 coveringthe cores 10. Each optical waveguide core 10 has one end aligned to oneof the V grooves 14 formed on the exposed surface 6 a and has N endsaligned to N of the V grooves 14 formed on the exposed surface 6 b. Theflat cut portion 132 of the connector 126′ is bonded to the exposedsurface 6 a of the PLC 4M so that the optical fibers 22 of the connector126′ are fitted in the V grooves 14 formed on the exposed surface 6 a.On the other hand, the flat cut portion 132 of the connector 154 isbonded to the exposed surface 6 b of the PLC 4M so that the opticalfibers 22 of the connector 154 are fitted in the V grooves 14 formed onthe exposed surface 6 b. Accordingly, an optical signal input from theconnector 126′ can be branched into a plurality of optical signals inthe PLC 4M, and the resultant optical signals can be output from theconnector 154. Conversely, a plurality of optical signals input from theconnector 154 can be combined to an optical signal in the PLC 4M, andthe resultant optical signal can be output from the connector 126′.

Referring to FIG. 36A, there is shown an exploded perspective view of anoptical module 156 according to a twenty-fifth preferred embodiment ofthe present invention. FIG. 36B is a perspective view of the opticalmodule 156 in its assembled condition. The optical module 156 is similarto the optical module 144 shown in FIG. 34 with the exception that amultifiber semicut connector 128 is added. That is, the optical module156 includes a PLC 4N, a semicut ferrule assembly 16F, a substrate 146,and the multifiber semicut connector 128. The PLC 4N includes aV-grooved silicon substrate 6 and an optical waveguide layer 8 formed onan intermediate portion of the silicon substrate 6. The siliconsubstrate 6 has exposed surfaces 6 a and 6 b at the opposite endportions. Each of the exposed surfaces 6 a and 6 b is formed with two Vgrooves 14. The optical waveguide layer 8 includes a Y-branch typeoptical waveguide core 10 and an optical waveguide cladding 12 coveringthe core 10 as similar to the structure of the PLC 4L shown in FIG. 31.A wavelength-filter 84 is mounted on the optical waveguide layer 8.

The PLC 4N is bonded at the exposed surface 6 a to the flat cut portion46 of the ferrule assembly 16F at its one end portion so that theoptical fibers 22 exposed to this portion of the ferrule assembly 16Fare fitted in the V grooves 14 formed on the exposed surface 6 a of thePLC 4N. The substrate 146 is bonded to the flat cut portion 46 of theferrule assembly 16F at its other end portion so that the optical fibers22 exposed to this portion of the ferrule assembly 16F are fitted in theV grooves 148 of the substrate 146. The multifiber semicut connector 128is similar to that shown in FIG. 31. The connector 128 is bonded at theflat cut portion 132 to the exposed surface 6 b of the PLC 4N so thatthe optical fibers 22 exposed to the flat cut portion 132 are fitted inthe V grooves 14 formed on the exposed surface 6 b. According to thispreferred embodiment, the optical elements 52 mounted on the substrate146 can be optically coupled through the ferrule assembly 16F and thePLC 4N to the connector 128.

Referring to FIG. 37A, there is shown an exploded perspective view of anoptical module 158 according to a twenty-sixth preferred embodiment ofthe present invention. FIG. 37B is a perspective view of the opticalmodule 158 in its assembled condition. The optical module 158 includes aV-grooved substrate 160, an optical element array 162 mounted on thesubstrate 160, and a multifiber semicut connector 154 similar to thatshown in FIG. 35A. The optical element array 162 is an LD array or a PDarray, for example. A plurality of electrodes 164 for the opticalelement array 162 are formed on the substrate 160. The substrate 160 hasa mount surface 160 a formed with a plurality of V grooves 166respectively corresponding to a plurality of individual optical elementsconstituting the optical element array 162. The substrate 160 is bondedat the mount surface 160 a to the flat cut portion 132 of the connector154 so that the optical fibers 22 of the connector 154 are fitted in theV grooves 166 of the substrate 160. With this configuration, theindividual optical elements of the optical element array 162 areoptically coupled to the optical fibers 22, respectively.

Referring to FIG. 38, there is shown an exploded perspective view of anoptical module 168 according to a twenty-seventh preferred embodiment ofthe present invention. The optical module 168 is similar to the opticalmodule 126 shown in FIG. 30A except that a multifiber semicut connector128′ is used in place of the connector 128. The multifiber semicutconnector 128′ includes a silicon substrate 170 having two V grooves 172and two V grooves 174, two optical fibers 22 fitted in the two V grooves172, two guide pins 134 fitted in the two V grooves 174, and a cover 176fixed to the silicon substrate 170 for partially covering the opticalfibers 22 and the guide pins 134. The silicon substrate 170 has anexposed surface 170 a for semicylindrically exposing the optical fibers22. The cover 176 also has two V grooves respectively opposed to the twoV grooves 172 for the optical fibers 22 and two V grooves respectivelyopposed to the two V grooves 174 for the guide pins 134. The PLC 4K isbonded at the exposed surface 6 a to the exposed surface 170 a of thesubstrate 170 so that the optical fibers 22 are fitted in the V grooves14 of the PLC 4K.

Referring to FIG. 39A, there is shown an exploded perspective view of anoptical module 178 according to a twenty-eighth preferred embodiment ofthe present invention. FIG. 39B is a perspective view of the opticalmodule 178 in its assembled condition. The optical module 178 includes aPLC 4P, a multifiber semicut connector 128 similar to that shown in FIG.30A, and a V-grooved glass plate 182. The PLC 4P includes a siliconsubstrate 6 and an optical waveguide layer 8 formed on the siliconsubstrate 6. The optical waveguide layer 8 includes a Y-branched opticalwaveguide core 10 and an optical waveguide cladding 12 covering the core10. The Y-branched optical waveguide core 10 consists of a first coreportion 10 a and a second core portion 10 b connected to an intermediateportion of the first core portion 10 a. The cladding 12 is partiallyremoved at one end portion of the layer 8 to form a narrow waveguideportion 8 a. The narrow waveguide portion 8 a includes the first andsecond core portions 10 a and 10 b. Accordingly, the silicon substrate 6has two exposed surfaces 6 a on the opposite sides of the narrowwaveguide portion 8 a. A pair of marker grooves 180 are formed on theexposed surfaces 6 a of the substrate 6.

The glass plate 182 is formed with two V grooves 184 for receiving theoptical fibers 22 of the connector 128, a relatively wide groove 186 forreceiving the narrow waveguide portion 8 a of the optical waveguidelayer 8 of the PLC 4P, and a pair of marker grooves 188 to be verticallyaligned with the pair of marker grooves 180 of the PLC 4P. The PLC 4P isbonded at the exposed surfaces 6 a to the glass plate 182 so that thenarrow waveguide portion 8 a of the PLC 4P is accommodated in the groove186 of the glass plate 182 and that the marker grooves 180 of the PLC 4Pare vertically aligned with the marker grooves 188 of the glass plate182, thereby positioning and fixing the PLC 4P and the glass plate 182with a high dimensional accuracy by a passive alignment technique.

The glass plate 182 is bonded to the flat cut portion 132 of theconnector 128 so that the optical fibers 22 of the connector 128 arefitted in the V grooves 184 of the glass plate 182 to thereby positionthe glass plate 182 to the connector 128. Although the PLC 4P has no Vgrooves, high-precision optical coupling between the bare optical fibers22 of the connector 128 and the first and second core portions 10 a and10 b of the optical waveguide core 10 of the PLC 4P can be realizedrelatively simply by using the V-grooved glass plate 182.

According to the present invention, it is possible to provide areceptacle type optical module suitable for cost reduction and sizereduction by using a semicut ferrule assembly at an interface to anoptical fiber.

What is claimed is:
 1. An optical module comprising: a substrate havinga plurality of grooves; an optical waveguide layer formed on saidsubstrate, said optical waveguide layer including a plurality of opticalwaveguide cores having a plurality of first ends respectively alignedwith said grooves, and an optical waveguide cladding covering saidoptical waveguide cores; and a connector assembly including a blockhaving a plurality of through holes, a plurality of optical fibersinserted and fixed in said through holes, respectively, and a pluralityof guide pins fixed to said block, said block having a flat cut portionfor semicylindrically exposing a part of each of said optical fibersinserted and fixed in said through holes; wherein said block is fixed atsaid flat cut portion to said substrate so that said parts of saidoptical fibers exposed to said flat cut portion are inserted into saidgrooves of said substrate until front ends of said optical fibers abutagainst said first ends of said optical waveguide cores, respectively.2. An optical module according to claim 1, wherein said opticalwaveguide cores have a plurality of second ends opposite to said firstends; said optical module further comprising a plurality of opticalelements mounted on said substrate so as to be optically coupled to saidsecond ends of said optical waveguide cores.